Protects sensitive reticles and photomasks against contaminants
Integral HEPA filter/fan module washes stored parts with
particle-free air
Electropolished 304 stainless steel slide-out drawers on
noncontaminating runners provide full access to every inch
of storage space
High-capacity configurations for vertical or horizontal
reticle storage in all standard cassette sizes
Locking casters allow safe, easy parts transfer
All tray styles are compatible with Terra's Automated
Stockers to allow cross-loading
Horizontal Storage Cabinet
Precision-routed HDPE slides hold cassettes at a 2°
angle from horizontal for secure positioning. Transparent
side panels made of acrylic or static-dissipative PVC.
Model shown: No. 3505-03; Capacity: 144 cassettes for
6-inch reticles.
Unique slides provide high-density storage while
affording convenient access
Vertical Storage Cabinet Electropolished 304 stainless steel trays hold reticles vertically.
Transparent side panels made of acrylic or static-dissipative
PVC. Model shown: No. 9130-03; Capacity: 450 cassettes
for 6-inch (152 mm) reticles.
Several standard capacities, with static-dissipative
or acrylic side panels
