CleanStocker™
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Ideal for storing heavy reticles, photomasks, and other
materials that require a contamination-free environment
- Rear-mounted HEPA filter/blower module, with filter rated
99.99% efficient @ 0.3µm particles, provides a continuous
horizontal laminar flow of particle-free air
- Sturdy polypropylene construction supports heavy loads
and resists a wide range of chemicals
- Keyed locking latch ensures parts security
- Available with castered stands to allow easy parts transfer
from one processing station to another
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The CleanStocker™ provides the perfect storage environment
for such particle-sensitive materials as reticles, photomasks,
wafers and optical equipment.
Its rear-mounted HEPA filter/blower module incorporates a
740 CFM (1258 m³/hr) variable-speed impeller that directs a continuous
flow of particle-free air forward through the storage area.
This high-volume flow quickly removes any contaminants that
might rest on stored items and keeps other particles from
entering the cabinet—even when an access door is opened.
Both HEPA filters (rated 99.99% efficient @ 0.3µm particles)
and ULPA filters (rated 99.999% efficient @ 0.12µm particles)
are available. Vents along the front door allow air to escape.
Three fixed shelves provide plenty of storage space; the top
shelf has 5.5" (140 mm) vertical clearance, and all others have 6.25" (159 mm).
Select single-door model (with 4 chambers) or double-door model
(with 8 chambers). Filter must be ordered separately. |
| Ordering
Information |
| Model |
Outside
Dimensions*
W"
x D" x H"
(mm) |
Inside
Dimensions**
W"
x D" x H"
(mm) |
CleanStocker™ |
Corresponding
Stand |
| 110VAC,
50/60Hz |
220VAC,
50/60Hz |
4"
(102 mm) high with levelers |
| Cat.
# |
$/Each |
Cat.
# |
$/Each |
Cat.
# |
$/Each |
| Single
Door |
26.5
x 20 x 34
(673 x 508 x 864) |
23.5
x 18.25 x 27.75
(597 x 464 x 705)
|
9010-20 |
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|
9010-20-220 |
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|
9010-22A |
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|
| Double
Door |
26.5
x 20 x 68
(673 x 508 x 1727) |
23.5
x 18.25 x 60
(597 x 464 x 1524) |
9010-21 |
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|
9010-21-220 |
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|
9010-22A |
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|
* Excluding 14.5"W x 11"D
x 29"H (368 mm x 279 mm x 737 mm) filter/blower module.
** Usable shelf space. Top Shelf has 5.5" (140 mm) of vertical shelf
clearance; others have 6.25'' (159 mm).
HEPA/ULPA
Filters Fit inside the filter/blower module of
the CleanStocker™.
Select the filter that meets your particle requirements
(one for single-door cabinet, two for double-door cabinet).
|
Cat.# |
$/Each |
HEPA
Filters
99.99% efficient at 0.3µm particles |
1681-02 |
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|
ULPA
Filters
99.999% efficient at 0.12µm particles |
1681-10 |
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